Sputter source with a target arrangement and a holding device
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United States of America Patent
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Nov 10, 1998
Issued Date -
N/A
app pub date -
Nov 20, 1995
filing date -
Oct 13, 1993
priority date (Note) -
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Abstract
A sputter source and a corresponding target and holding device are provided in which the target is held by form locking arrangements. The target is pushed in an x-direction in the manner of a sliding drawer and is fixed by a releasable lock. A foil, which defines a cooling system on the holding device side, braces the fixed target when the cooling system is acted upon by pressure.
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