Platen for use with lithographic stages and method of making same
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United States of America Patent
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Oct 27, 1998
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N/A
app pub date -
Aug 22, 1997
filing date -
Oct 3, 1994
priority date (Note) -
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Abstract
A lithographic stage is carried by a platen formed of a plurality of tiles containing a uniformly spaced grid of teeth and having low reluctance and high resistivity. The teeth have been formed by powder metal technology using as powder particles of a ferromagnetic material, the particles being of high resistivity or coated with an insulating material. The space between the teeth is filled with non-magnetic material, such as epoxy, and the entire platen finished such that it has a smooth and uniform flat upper surface.
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