Importance

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Abstract

A housing provides temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes. The housing is adaptable for use with a temperature controller and a pressure measurement device. The housing includes a temperature monitoring mechanism and temperature control connections. The temperature monitoring mechanism provides in-situ specimen temperature indications. It includes a first enclosure having a specimen supporting portion on an exterior surface thereof. A fluid conduit has a first end in fluid communication with an interior portion of the first closure. A second enclosure has an interior portion thereof in fluid communication with a second end of the fluid conduit. The second enclosure includes the ability for attachment to a pressure measurement device. Temperature indications of a test specimen positioned on the specimen supporting portion are correlated with pressures in the first and second enclosures. The correlations provide commensurate indications of pressure to the pressure measurement device to provide the in-situ specimen temperature indications. The temperature control connections allow use with a temperature controller for providing a desired temperature of the specimen supporting portion.

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First Claim