Thin zirconia disk substrate
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United States of America Patent
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Oct 13, 1998
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N/A
app pub date -
May 15, 1996
filing date -
May 15, 1996
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Expired
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Abstract
This invention relates to a disk substrate consisting essentially of zirconia partially stabilized by a rare earth oxide, the disk substrate having a thickness of no more than 0.635 mm, a diameter of at least 10 mm, and a mean pore size of no more than 0.1 um.
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