Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith
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United States of America Patent
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Sep 22, 1998
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N/A
app pub date -
Mar 11, 1996
filing date -
Feb 6, 1996
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Expired
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Abstract
A photo-chemical vapor deposition ('photo-CVD') apparatus has exchange apparatus of optical window and method of exchanging optical window therewith. There photo-CVD apparatus has exchange apparatus of optical window which can replace an optical window blurred by attachment of materials produced by dissociation of reaction gas or materials used for disposition in a reaction chamber of a photo-CVD apparatus during photo-CVD reaction with a clean optical window without exposing the inside of the reaction chamber to the air and to the method of exchanging optical window of the photo-CVD apparatus using the exchange apparatus of optical window.
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