Apparatus for coating substrates in a vacuum
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United States of America Patent
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Sep 15, 1998
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N/A
app pub date -
Aug 1, 1996
filing date -
Oct 6, 1995
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Abstract
An alternating-current source (2) is connected to two cathodes (6,7) which cooperate electrically with targets which are sputtered in a gas discharge while a process gas is introduced in a vacuum chamber (15). A network formed of a transformer (3) and additional coils (5, 12, 13) and condensers (4, 8, 9, 10, 11) acts as a filter to assure a stable coating process.
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