Grinding apparatus, and process for the operation thereof
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United States of America Patent
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Sep 15, 1998
Grant Date -
N/A
app pub date -
Jul 3, 1996
filing date -
Jul 3, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A grinding apparatus comprises a table having a first bearing surface; a chuck mounted on the table for rotation about a chuck axis and provided with means for holding a workpiece, the chuck having on its underside a second bearing surface, such that when the chuck is stationary, the second bearing surface rests on the first bearing surface; a grinding head having a least one grinding surface capable of grinding a workpiece mounted on the table, the grinding head being mounted for rotation about a head axis substantially parallel to the chuck axis; and transport means for moving the chuck relative to the grinding head in both directions along a transport axis substantially perpendicular to both the chuck axis and the head axis. To allow rotation of the chuck to begin smoothly, the apparatus has lubricating means provided on the table for introducing a lubricating fluid under superatmospheric pressure between the table and the chuck, thereby causing the chuck to lift away from the table; and control means arranged to first introduce the lubricating fluid through the lubricating means while the chuck is not rotating relative to the table, and thereafter to cause the chuck to rotate relative to the table.
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