Optical element of multilayered thin film for x-rays and neutrons
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United States of America Patent
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Aug 25, 1998
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N/A
app pub date -
Nov 22, 1996
filing date -
Aug 1, 1994
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Expired
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Abstract
This invention relates to novel methods of producing flat and curved optical elements with laterally and depth graded multilayer thin films, in particular multilayers of extremely high precision, for use with soft and hard x-rays and neutrons and the optical elements achieved by these methods. In order to improve the performance of an optical element, errors in d spacing and curvature are isolated and subsequently compensated.
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