Storehouse for use in storage of clean materials
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United States of America Patent
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Aug 25, 1998
Grant Date -
N/A
app pub date -
Jun 7, 1996
filing date -
Jun 13, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A storehouse is constituted including a clean room 12 and a storage space 10 for storing clean materials, which is isolated from the clean room. The clean air for storage is generated by a storage air generator 36 and is supplied to the storage space 10 through air supply systems 32, 46. The clean air for storage is purified to such a cleanliness level that it contains hydrocarbon group including methane of less than 10 ppb by using the method of combustion with a catalyst, or purified to such a cleanliness level extent that the contact angle of a pure water droplet or the surface resistivity to the clean material surface can be kept at substantially the same level as that which is indicated immediately after cleaning the material, by using a catalytic reaction tower, an activated charcoal filter, or a fluid bed type adsorbing tower, all of which are made by using materials generating no gaseous impurities. Accordingly, it is possible to effectively prevent the substrate surface from contamination caused by the organic substance. No inert gas is employed, thus ensuring safety operation with an inexpensive running cost.
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