Method for integrating microelectromechanical devices with electronic circuitry
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United States of America Patent
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Aug 25, 1998
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N/A
app pub date -
Sep 6, 1995
filing date -
Sep 6, 1995
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Abstract
A method for integrating one or more microelectromechanical (MEM) devices with electronic circuitry. The method comprises the steps of forming each MEM device within a cavity below a device surface of the substrate; encapsulating the MEM device prior to forming electronic circuitry on the substrate; and releasing the MEM device for operation after fabrication of the electronic circuitry. Planarization of the encapsulated MEM device prior to formation of the electronic circuitry allows the use of standard processing steps for fabrication of the electronic circuitry.
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