Zero dead-leg valve structure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Aug 18, 1998
Issued Date -
N/A
app pub date -
Dec 31, 1996
filing date -
Apr 9, 1993
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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SCI SYSTEMS INC | HUNTSVILLE AL |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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DuRoss, Ronald R | Huntsville, AL | 7 | 304 |
# of filed Patents : 7 Total Citations : 304 | |||
Tucker, William K | Cherry Hill, NJ | 2 | 40 |
# of filed Patents : 2 Total Citations : 40 |
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Patent Citation Ranking
- 4 Citation Count
- F16K Class
- 3.86 % this patent is cited more than
- 27 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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