Zero dead-leg valve structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5794659
SERIAL NO

08777837

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Abstract

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A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.

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Patent Owner(s)

Patent OwnerAddress
SCI SYSTEMS INCHUNTSVILLE AL

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DuRoss, Ronald R Huntsville, AL 7 304
Tucker, William K Cherry Hill, NJ 2 40

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Patent Citation Ranking

  • 4 Citation Count
  • F16K Class
  • 3.86 % this patent is cited more than
  • 27 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges2948015952178321101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 80100 +0255075100125150175200225250275300325350375400425450475500525

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