Apparatus for transfer of workpieces into and out of a coating chamber
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United States of America Patent
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Aug 11, 1998
Grant Date -
N/A
app pub date -
Jun 27, 1995
filing date -
Aug 8, 1994
priority date (Note) -
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Abstract
A pivot arm (3) is rotatable about an axis for delivering and removing a flat workpiece (24) into and out of the area of the lock (19) of an evacuable coating chamber (26). The pivot arm (3) is provided at its distal end with the retaining bolt (12) which is perpendicular to the plane (20) of the lock opening (19) and attached to a central part of a flexible diaphragm. The diaphragm is substantially parallel to the sealing surface of a workpiece carrier (16) and is fixed around its outer radial edge to the workpiece carrier so that the workpiece carrier (16) is able to tilt slightly during its vertical closing motion.
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