Evaporator boat for an apparatus for coating substrates
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United States of America Patent
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Aug 4, 1998
Grant Date -
N/A
app pub date -
Feb 21, 1997
filing date -
Feb 28, 1996
priority date (Note) -
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Abstract
A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part (8) being provided with openings (12) for reducing cross sectional area where increased ohmic heating is desired, such as near the clamping points and between individual areas where wire is fed for melting in the trough.
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