Method for manufacturing a mold for a disc-shaped registration carrier
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United States of America Patent
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Jul 14, 1998
Issued Date -
N/A
app pub date -
Apr 10, 1997
filing date -
Oct 21, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a device and a method for manufacturing a mould for a disc-shaped registration carrier, said device being provided with a station for applying a photosensitive layer, such as a photoresist layer, to a substrate, with a station for exposing said photosensitive layer in accordance with the registration data to be stored, with a station for developing the photosensitive layer and metallizing the side of the substrate carrying the developed photoresist layer, and with a station for applying a metal coating, wherein the various stations are accommodated in a housing and means for receiving the substrates are provided in the various stations, whilst a transport mechanism disposed within the housing is provided with at least one transport means for gripping a substrate, which transport means is movable in a horizontal plane in two directions including an angle with each other, and which is also capable of moving upward and downward within the housing.
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