Apparatus for laser exposure of a substrate disk and a method for the centered mounting of a substrate disk
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United States of America Patent
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Jul 7, 1998
Grant Date -
N/A
app pub date -
Nov 27, 1996
filing date -
Nov 28, 1995
priority date (Note) -
Expired
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Abstract
A vertically disposed drive spindle (5) rotates turntable (6) supporting a substrate (7) at high speed, the turntable having a smaller diameter than the substrate. Coaxial with the turntable (6), a centering ring (10) having a frustoconical inside surface can be raised vertically between a lower and upper position. The latter has on its upper side a greater diameter and on its lower side a smaller diameter than the substrate (7). In its lower position the centering ring (10) is at a distance from a substrate (7) lying on the turntable (6), but in its upper position its inside surface supports the substrate (7) at an axial distance above turntable (6).
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