Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence
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United States of America Patent
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Jul 7, 1998
Grant Date -
N/A
app pub date -
Mar 17, 1997
filing date -
Mar 17, 1997
priority date (Note) -
Expired
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Abstract
Cylindrical surfaces of a test cylinder are measured with a grazing incidence interferometer. Separate measures of a test cylinder's cylindrical surface and a master cylinder's surface are made and compared to obtain absolute measures of the test cylinder's surface. Surface fitting techniques are used to discount the effects of positioning errors, and a separate measurement is used to resolve remaining ambiguities for extending the range of test cylinder sizes that can be measured with absolute dimensions.
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