Metal oxide semiconductor controlled thyristor with an on-field effect transistor in a trench
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United States of America Patent
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Jul 7, 1998
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N/A
app pub date -
Jan 16, 1996
filing date -
Jan 16, 1996
priority date (Note) -
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Abstract
One embodiment of a metal oxide semiconductor controlled thyristor in accordance with the present invention has a semiconductor wafer with opposing first and second surfaces. The wafer includes first through sixth sequential regions which are disposed one above the other. The first region includes the second surface of the wafer and each of the second through sixth regions has at least a portion which extends up to the first surface. The first, third, and sixth regions have a first type of conductivity and the second, fourth, and fifth regions have a second type of conductivity. A trench with a bottom and sidewalls extends from the first surface and passes through the fourth, fifth, and sixth regions and into the third region. A dielectric material coats the bottom and sidewalls of the trench and a conductive material fills the remainder of the trench. In an alternative embodiment: the third through sixth regions have at least a portion which extends up to the first surface; the first, fourth, and sixth regions have a first type of conductivity; the second, third, and fifth regions have a second type of conductivity; and the trench extends from the first surface and passes through the fifth and sixth regions and into the fourth region.
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