Apparatus and methods for providing phase controlled evanescent illumination
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United States of America Patent
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Jun 30, 1998
Grant Date -
N/A
app pub date -
Aug 21, 1996
filing date -
Aug 21, 1996
priority date (Note) -
Expired
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Abstract
Apparatus and methods for providing phase controlled evanescent illumination. The phase controlled evanescent illumination is useful for Imaging, metrology, and energy delivery. The light waves comprising the evanescent electromagnetic field are inhomogeneous in that their planes of equal phase are substantially perpendicular to the direction of propagation and to their planes of constant amplitude. The planes of equal phase are therefore normal to the surface to which the evanescent field is adjacent and to a sample surface illuminated by this field as well. Methods and means for dynamic or static phase shifting of inhomogeneous waves comprising the evanescent field are disclosed.
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