Ultrafine particles and production method thereof
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United States of America Patent
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Jun 30, 1998
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N/A
app pub date -
Feb 7, 1996
filing date -
Feb 9, 1995
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Abstract
An electron beam of more than 1.times.10.sup.19 e/cm.sup.2 .multidot.sec is irradiated to metastable metal oxide particles such as .theta.-Al.sub.2 O.sub.3 particles or the like disposed on an amorphous carbon film. A phase transformation or the like of the metastable metal oxide particles is occurred by the electron beam irradiation. Thus, stable metal oxide ultrafine particles such as an .alpha.-Al.sub.2 O.sub.3 ultrafine particle 2 whose diameter is more tiny than the metastable metal oxide particles used, and a metal ultrafine particle composed of an oxide such as Al ultrafine particles are produced.
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