Multifunctional air filter and air-circulating clean unit with the same incorporated therein
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United States of America Patent
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Jun 30, 1998
Issued Date -
N/A
app pub date -
May 30, 1996
filing date -
Nov 30, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A multifunctional air filter module includes a filter case having an air introduction side opening and an air discharge side opening and a pleated fabric air filter element containing an activated carbon. The periphery of the pleated filter element is fixed in the filter case without clearance therebetween. At least one fabric filter element composed of a fabric including an activated carbon having a strong base, KMnO.sub.4 or ZnCl.sub.2, a fabric of a cation exchange fiber or a fabric of an anion exchange fiber, is simply placed in air introduction side grooves formed by pleats of the fixed air filter element, and is replaceable and can be regenerated. The air filter module is compact and can reduce the volume of a space occupied thereby in a semiconductor plant. Flexibility of installation thus is provided and the range of the use thereof is widened. Multifunctionality is increased easily merely by addition of replaceable filter element fabrics.
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