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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
OPTISCHE WERKE G RODENSTOCK KG	ISARTALSTRASSE 43 MUNCHEN D-80469

International Classification(s)

• B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Parker, Theodore L	Danville, CA	101	3243
# of filed Patents : 101 Total Citations : 3243
Soane, David S	Piedmont, CA	253	7662
# of filed Patents : 253 Total Citations : 7662

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Patent Citation Ranking

• 6 Citation Count
• B05D Class

• 2.34 % this patent is cited more than
• 27 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 9726563

Device member including cavity and method of producing the device member including cavity

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Abstract

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A device member including a cavity, includes a base member, an interlayer, an upper layer, an opening portion, and a gas-permeable sealing layer. The base member includes a first semiconductor. The interlayer is formed on the base member and is non-conductive. The upper layer is formed on the interlayer and includes a second semiconductor. The opening portion is formed at the upper layer. The gas-permeable sealing layer is formed to seal the opening portion formed at the upper layer. The cavity is formed by removing the interlayer with an etching gas that penetrates through the sealing layer.

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Description

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Claims

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Legal Events

 

• MAFP2024
• MAFP2021
• I2017
• STCF2017
• P2015
• AS2015
• F2013
• PD2012

Date	Code	Event	Description
Dec 30, 2024	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Jan 27, 2021	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Aug 08, 2017	I	Issuance
Jul 19, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Jul 30, 2015	P	Published
Mar 23, 2015	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FUJITA, HIROYUKI;TOSHIYOSHI, HIROSHI;MITSUYA, HIROYUKI;SIGNING DATES FROM 20150212 TO 20150218;REEL/FRAME:035230/0559 Owner name: KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO, JAPAN free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FUJITA, HIROYUKI;TOSHIYOSHI, HIROSHI;MITSUYA, HIROYUKI;SIGNING DATES FROM 20150212 TO 20150218;REEL/FRAME:035230/0559 Owner name: THE UNIVERSITY OF TOKYO, JAPAN
Jun 18, 2013	F	Filing
Sep 25, 2012	PD	Priority Date