Method of making a surface micro-machined silicon pressure sensor
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United States of America Patent
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Jun 2, 1998
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N/A
app pub date -
Aug 28, 1995
filing date -
Aug 28, 1995
priority date (Note) -
Expired
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Abstract
Methods for surface micro-machining silicon wafers, including coating cavity sidewalls with oxidation-resistant material to prevent lateral oxidation. This in turn prevents 'bird's beak' during formation of a diaphragm. The methods are useful for, among other things, the manufacture of absolute-type pressure sensors. Along with bulk micro-machining techniques, the methods can be used to produce gauge- and differential-type pressure sensors, as well.
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