Variable annular illuminator for photolithographic projection imager
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 26, 1998
Issued Date -
N/A
app pub date -
Aug 17, 1995
filing date -
Mar 1, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully