Charged particle beam expander
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United States of America Patent
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May 26, 1998
Grant Date -
N/A
app pub date -
Dec 27, 1996
filing date -
Dec 27, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A charged particle beam expander increases a diameter of a charged particle beam while increasing uniformity of an area energy distribution thereof. The charged particle beam expander has a first linear optics section receiving the charged particle beam from a particle accelerator and for forming the charged particle beam to have a generally circular cross-section and a non-linear optics section receiving the charged particle beam from the first linear optics section and for redistributing charged particles from a periphery of the charged particle beam toward a core thereof. The charged particle beam expander also has a second linear optics section receiving the charged particle beam from the non-linear optics section, the second linear optics section for increasing the diameter of the charged particle beam and for imaging the charged particle beam onto the target.
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