Formation of layer having openings produced by utilizing particles deposited under influence of electric field
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United States of America Patent
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May 26, 1998
Grant Date -
N/A
app pub date -
Jun 7, 1996
filing date -
Jun 7, 1996
priority date (Note) -
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Abstract
A method for creating a solid layer (36A or 52A) through which openings (38 or 54) extend entails subjecting particles (30) suspended in a fluid (26) to an electric field (E.sub.A) to cause a number of the particles to move towards, and accumulate over, a structure placed in the fluid. The structure, including the so-accumulated particles, is removed from the fluid. Solid material is deposited over the structure at least in the space between the so-accumulated particles. The particles, including any overlying material (36B or 52B), are removed. The remaining solid material forms the solid layer through which openings extend at the locations of the so-removed particles. The structure is typically a layer is then typically either a gate layer for the electron-emitting device or a layer used in forming the gate layer.
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