Laser system and method with thermally compensated optics
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United States of America Patent
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May 12, 1998
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N/A
app pub date -
Feb 10, 1997
filing date -
Aug 9, 1994
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Expired
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Abstract
A laser system with compensated optics contains at least one optical element which is thermally coupled to a heat source in order to thermally compensate for a deformation of optical elements disposed in a beam path of the laser system. The deformation is brought about by the laser beam.
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