Purgeable connection for gas supply cabinet
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United States of America Patent
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May 12, 1998
Grant Date -
N/A
app pub date -
Dec 22, 1993
filing date -
Dec 22, 1993
priority date (Note) -
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Abstract
A method and system for purging an ultra-high purity gas supply manifold comprising: a process connection through which ultra-high purity gas is communicated to a process; a first pigtail conduit in selective flow communication with a high purity gas source; a second pigtail conduit in selective flow communication with said process connection; means for creating a vacuum and means for selectively placing said vacuum means in communication with said first pigtail; an ultra-high purity process gas source; a block valve assembly comprising an inlet port in flow communication with said process gas source, a first outlet port in selective communication with said purge gas supply through connection with said first pigtail and second outlet port in selective communication with said process connection through connection with said second pigtail.
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