Mirror driving method and apparatus of micro-mirror array
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United States of America Patent
Stats
-
May 5, 1998
Grant Date -
N/A
app pub date -
Jan 25, 1996
filing date -
Feb 25, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.
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Patent Citation Ranking
- 166 Citation Count
- G09G Class
- 98.09 % this patent is cited more than
- 27 Age