Mirror driving method and apparatus of micro-mirror array

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United States of America Patent

PATENT NO 5748172
SERIAL NO

08591785

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Abstract

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In a mirror driving method of a micro-mirror array and an apparatus thereof, each of a plurality of mirrors is pivotally supported by hinges fixed to a substrate, and a permanent magnet is attached beneath the substrate to form a magnetic field about the mirrors. A coiled conductive layer is formed on the rear surface of each mirror to be selectively applied with current according to a video signal, and the selected mirror pivots in correspondence with the electrostatic force operative between the conductive layer to which the current is applied and the magnetic field. Thus, a light beam irradiating the micro-mirror array can be modulated according to an image, and mass production is made possible due to a simple structure which provides for a stable driving action.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRO-MECHANICS CO LTDSUWON-SI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Han-ki Suwon, KR 15 279
Lee, Chul-woo Seoul, KR 192 1827
Song, Ci-moo Sungnam, KR 12 441

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