Method and composition for forming ceramics and article coated with the ceramics

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United States of America Patent

PATENT NO 5747623
SERIAL NO

08543157

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Abstract

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A method for forming dense ceramics, particularly a ceramic coating by a low temperature treatment is provided. The method for forming ceramics according to the invention is characterized in that a polysilazane having a number-average molecular weight of 100 to 50,000 or a modified polysilazane thereof is subjected to a heat treatment, then exposed to an atmosphere containing water vapor or immersed in distilled water containing a catalyst, or both, or is brought into contact with Pd.sup.2+ ions and water, the polysilazane having a skeleton comprising the unit represented by the following general formula (I): ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 each independently represents a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group, an aryl group, a group other than the above and having a carbon atom directly attached to the silicon atom, an alkylsilyl group, an alkylamino group and an alkoxy group; with the proviso that at least one of R.sub.1, R.sup.2 and R.sup.3 is a hydrogen atom. A method wherein said modified polysilazane is only fired at a temperature of 400.degree. C. or below is also provided.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS IP (JAPAN) KKBUNKYO GREEN COURT 28-8 HONKOMAGOME 2-CHOME BUNKYO-KU TOKYO 113-0021

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Hiroyuki Tokyo, JP 122 1985
Hashimoto, Haruo Iruma-gun, JP 30 444
Kizaki, Masami Iruma-gun, JP 5 98
Kokubo, Masahiro Iruma-gun, JP 9 70
Matsuo, Hideki Iruma-gun, JP 56 584
Ohbayashi, Takashi Iruma-gun, JP 25 147
Sakurai, Takaaki Tokyo, JP 13 410
Shimizu, Yasuo Iruma-gun, JP 304 5485
Suzuki, Tadashi Iruma-gun, JP 237 4214
Tashiro, Yuji Iruma-gun, JP 20 158

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