Process of measuring coplanarity of circuit pads and/or grid arrays
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United States of America Patent
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Mar 31, 1998
Grant Date -
N/A
app pub date -
Oct 15, 1996
filing date -
Oct 15, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process of measuring coplanarity of an array of conductive elements on a circuit device is disclosed. Light is impinged from a reference plane onto an element of the array at a predetermined angle of incidence. Light is also impinged from the reference plane onto a reflective feature on a measurement plane determined by three points of the circuit device having highest elevations from a base of the circuit device, at the same predetermined angle of incidence. A response of the light impinged onto the element of the array and the reflective feature on the measurement plane is measured to determine coplanarity of the array.
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