Oxide ceramic sintered bodies
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United States of America Patent
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Mar 24, 1998
Issued Date -
N/A
app pub date -
Nov 27, 1996
filing date -
Jul 12, 1993
priority date (Note) -
Expired
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Abstract
A titania ceramic body consists of a surface thereof not exceeding 35 pores per square millimeter. The titania ceramic body is made by preparing a titania powder having a purity of at least 99.8 wt % titania and an average particle diameter of 0.5 .mu.m, compacting the powder, sintering a compact at a temperature in the range for 1000.degree. to 1300.degree. C. in air or in a non-air surrounding gas under ordinary pressure to produce a sintered body, hot isostatic pressing treating the sintered body in argon at a temperature of from 800.degree. C. to below temperature carried out in above sintering step under pressure of at least 500 kg/cm2, and then grinding and polishing the hot isostatic pressing treated body.
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