Discharge unit and electrode for a pulsed discharge laser
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United States of America Patent
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Mar 17, 1998
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N/A
app pub date -
Nov 7, 1996
filing date -
Oct 14, 1993
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Abstract
An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.
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