Fringe pattern discriminator for interferometer using diffraction gratings
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United States of America Patent
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Mar 3, 1998
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N/A
app pub date -
Jun 27, 1996
filing date -
Jun 27, 1996
priority date (Note) -
Expired
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Abstract
An object fringe pattern is distinguished from other fringe patterns in an interferogram produced by an interferometer using a pair of diffraction gratings for separating and recombining test and reference beams. The object on which a test beam is grazingly incident is moved in X and Y directions in a plane perpendicular to an optical axis of the interferometer to change the brightness regions of the object fringe pattern. A computer identifies pixels whose irradiance changes in response to object movement, and then only irradiance data from the identified pixels is used in analyzing the interferogram to produce a measurement of a surface of the object.
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