X-ray beam position monitor and its position measurement method
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United States of America Patent
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Feb 10, 1998
Grant Date -
N/A
app pub date -
Apr 5, 1996
filing date -
Apr 7, 1995
priority date (Note) -
Expired
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Abstract
The present invention provides a X-ray beam position monitor, including a diamond plate placed so that the X-ray beam pass through diamond plate, and a plurality of electrode pairs placed on both sides of the diamond plate. The monitor makes it possible to monitor position of high power X-ray beam with high accuracy and at high speed. In addition, the monitor can be stably operated and reduce costs for manufacturing itself.
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