Method and device for controlling the electric current density across a workpiece during heat treatment in a plasma
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United States of America Patent
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Feb 10, 1998
Grant Date -
N/A
app pub date -
Jun 13, 1996
filing date -
Jun 13, 1995
priority date (Note) -
Expired
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Abstract
In a method for controlling the electric current density across a workpiece in a furnace during heat treatment in a plasma an auxiliary electrode with a known surface area is introduced into the furnace. A batch of workpieces is then introduced into the furnace. First a plasma of a neutral gas is generated within the furnace. The total current within the furnace and the current within the auxiliary electrode are measured. The surface area of the workpieces is calculated according to the equation ##EQU1## The auxiliary electrode is then switched off and a material-transmitting plasma is generated. The nominal total electric current for controlling a desired nominal current density is then calculated according to the equation I.sub.Gnominal =F.sub.CH .multidot.J.sub.nominal. The total current is measured in the furnace and is set to the nominal current value.
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