Method for producing a ferroelectric thin film

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United States of America Patent

PATENT NO 5714194
SERIAL NO

08447426

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Abstract

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A method for producing a ferroelectric thin film according to the present invention includes the steps of: forming a PbTiO.sub.3 film on an electrode provided on a substrate; and forming a PZT film on the PbTiO.sub.3 film by a CVD method.

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Patent Owner(s)

Patent OwnerAddress
SHARP KABUSHIKI KAISHASAKAI-SHI OSAKA 590-8522

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishihara, Kazuya Tenri, JP 89 2187
Komai, Masaya Tenri, JP 2 20

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