Crystal pulling apparatus
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United States of America Patent
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-
Jan 13, 1998
Grant Date -
N/A
app pub date -
Sep 26, 1996
filing date -
Sep 26, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A crystal pulling apparatus for producing a crystal boule (17) from a material melted in a crucible (4) has, in a tank (1), a heater (5) surrounding the crucible (4). The tank (1) has in the area of the crucible (4) an annular chamber (8) defined on the heater (5) side by an inner protective wall (6) and connected to the shielding gas outlet (14, 15), and on the outside by an outer protective wall (7) behind which the thermal insulation (10) of the tank (1) is located.
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