Thermal gas cracking source technology
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United States of America Patent
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Dec 2, 1997
Grant Date -
N/A
app pub date -
Dec 21, 1994
filing date -
Dec 21, 1994
priority date (Note) -
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Abstract
An atomic hydrogen source. The source has an elongated cylindrical structure with proximal and distal or inner and outer ends. A head structure is disposed at the proximal end for communicative connection with electrical power, gas, temperature control and related systems. A mounting flange is disposed along the length of the source for connection with an MBE or other apparatus. A tube structure is disposed at the distal end for extension into the apparatus. The tube structure includes gas and power conduction elements, including a high temperature resistive filament for cracking gas.
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