Apparatus for plasma treatment of the inside surface of a fuel tank

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5690745
SERIAL NO

08544158

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Abstract

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A treatment chamber (1) evacuable by vacuum pumps (13,13') has a mounting (26,26', . . .) bearing the hollow body (4) in the treatment chamber (1), and a line (9,9') for the admission of a process gas into the treatment chamber (1). A microwave conductor (20,20' . . .) is connected with a generator (19,19' . . .) for igniting a plasma in the area of channels formed by a sheet-metal shroud (2,2') matching the configuration of the hollow body (4). A closure (7,7') is provided through which the filler opening (6, 6') of the hollow body (4) can be closed pressure-tight, and a line (9,9') for the process gas passes through the closure.

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Patent Owner(s)

Patent OwnerAddress
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AKTIENGESELLSCHAFTWILHELM-ROHN-STRASSE 25 D 63450 HANAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boll, Siang-Hong Alzenau, DE 1 53
Grunwald, Heinrich Butzbach, DE 8 191
Kloberdanz, Hermann Linsengericht, DE 3 73
Lacher, Roland Gelnhausen, DE 1 53

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