Object fixturing in interferometer
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United States of America Patent
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Nov 4, 1997
Grant Date -
N/A
app pub date -
Apr 18, 1996
filing date -
Apr 18, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An object fixturing system applies to an interferometer having a pair of diffraction gratings arranged to produce and recombine test and reference beams. The fixturing system positions an object between the diffraction gratings so that a test beam is incident on a surface of the object at a grazing incidence angle. A positioning fixture engages the object and a reference surface of the interferometer in moving the object to a measurement position on a window platform that transmits the test and reference beams. The fixture is then removed for a simultaneous measurement of an entire surface of the object, which can be clamped in place if necessary by a clamping window that also transmits the test and reference beams.
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