Cathode assembly

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United States of America Patent

PATENT NO 5683560
SERIAL NO

08676499

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Abstract

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A magnetic yoke (22,23) carrying rows of permanent magnets (33,34) and a target (49,50) is connected to a top plate (41,42) by spring bolts (67) which urge the yoke toward the top plate. Rotatable cams (43,44) between the top plate and the yoke are used to adjust the distance between the top plate and the yoke. Clamping bars (37,38) having a claw-like edge parts (59-66) limit the maximum distance and, in a preferred embodiment, hold the target against the yoke.

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD MATERIALS GMBHD-63450 HANAU

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Marquardt, Dietmar Erlensee, DE 6 68
Szczyrbowski, Joachim Goldbach, DE 43 1182

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