System and method for performing optical proximity correction on macrocell libraries
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United States of America Patent
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Oct 28, 1997
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Mar 6, 1995
filing date -
Mar 6, 1995
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Abstract
The system and method performs optical proximity correction on an integrated circuit (IC) mask design by initially performing optical proximity correction on a library of cells that are used to create the IC. The pre-tested cells are imported onto a mask design. All cells are placed a minimum distance apart to ensure that no proximity effects will occur between elements fully integrated in different cells. An optical proximity correction technique is performed on the mask design by performing proximity correction only on those components, e.g., lines, that are not fully integrated within one cell.
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