Plasma apparatus
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United States of America Patent
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Oct 21, 1997
Grant Date -
N/A
app pub date -
Mar 25, 1996
filing date -
Sep 22, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Components such as an earth plate, a gas introduction ring, and the like placed in a reaction chamber in a plasma apparatus are made of aluminum containing magnesium in a concentration of 2.2 to 2.8% by weight and are not coated with alumite. In addition, a heater incorporated in a section of the reaction chamber heats the section during a plasma cleaning process. Further, an electrical discharge chamber is also incorporated in the plasma apparatus for providing a plasma to the reaction chamber for efficient plasma cleaning of the apparatus.
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