Diffraction gratings in optical waveguide components and production method thereof
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United States of America Patent
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Oct 7, 1997
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N/A
app pub date -
Dec 11, 1995
filing date -
Dec 9, 1994
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Abstract
A diffraction grating structure for coupling light into or out of a high refractive index waveguide layer on a carrier substrate is formed by irradiating the carrier substrate and/or the layer with UV laser light that is subject to simultaneous, spatially periodic intensity modulation. The modulation may be achieved, for example, by a biprism. The modulated UV light has the effect of periodically modulating the local refractive index of the waveguide layer or of the surface of the substrate to form the diffraction grating.
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