Apparatus for applying thin layers to a substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5662784
SERIAL NO

08622443

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AKTIENGESELLSCHAFTWILHELM-ROHN-STRASSE 25 D 63450 HANAU

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Marquardt, Dietmar Erlensee, DE 6 68
Sauer, Andreas Hosbach, DE 56 369
Schuhmacher, Manfred Alzenau, DE 12 121
Winter, Erwin Hanau, DE 2 11

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation