Process for the recycling of spent indium oxide-tin oxide sputtering targets
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United States of America Patent
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Aug 26, 1997
Grant Date -
N/A
app pub date -
Sep 7, 1995
filing date -
Oct 27, 1994
priority date (Note) -
Expired
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Abstract
Compacted ITO material is ground to a powder with particles in the size range of less than 500 .mu.m, whereupon the powder thus obtained is molded into new target blanks, either alone or in a mixture with unused ITO powder, under the simultaneous action of pressure and temperature. The temperature is kept sufficiently low so that recrystallization does not take place and the original grain size is preserved.
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