Process gas distribution system and method with automatic transducer zero calibration
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 12, 1997
Issued Date -
N/A
app pub date -
Apr 15, 1996
filing date -
Aug 31, 1990
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as 'tool' locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an 'offset' to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.
First Claim
Other Claims data not available