Interferometric measurement of surfaces with diffractive optics at grazing incidence
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United States of America Patent
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Aug 5, 1997
Issued Date -
N/A
app pub date -
Jun 7, 1995
filing date -
Jan 19, 1995
priority date (Note) -
Expired
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Abstract
An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a form that is different than the first portion (32) along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) into a form in common with the first portion (32) of the beam of light (28). The two beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).
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