Method of liquid treatment of micro-structures comprising structural members liable to be bent

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United States of America Patent

PATENT NO 5652167
SERIAL NO

08083371

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Abstract

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Micro-structures comprising at least a structural member, which is liable to be bent under an external force and formed so as to leave a space between the member and another member liable to be bent and/or other rigid component, are successfully treated using a treating liquid, without suffering permanent deformation resulting from the use of the treating liquid, by removing the micro-structures from the liquid to an environment having a pressure less than the atmospheric pressure; or displacing the micro-structures from the treating liquid to another treating liquid having a smaller surface tension than that of the former liquid, and then removing the micro-structures from the latter liquid; or drying the micro-structures removed from the treating liquid by exposing the same to vapor of a liquid having a smaller surface tension than that of the treating liquid; or removing the micro-structures from the treating liquid to the atmosphere, and drying them using an energy beam of high intensity or an ultrasonic wave. Micro-structures are also disclosed which comprise at least a member liable to be bent but are capable of avoiding permanent deformation of the member resulting from a treatment using a liquid.

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Patent Owner(s)

Patent OwnerAddress
FUJITSU SEMICONDUCTOR LIMITED2-10-23 SHIN-YOKOHAMA KOHOKU-KU YOKOHAMA-SHI KANAGAWA 222-0033

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ikeda, Toshimi Kawasaki, JP 23 147
Inoue, Fumihiko Kawasaki, JP 36 238
Ishikawa, Junichi Kawasaki, JP 65 445
Katayama, Masaya Kawasaki, JP 27 206
Kuwamura, Masahiro Kasugai, JP 4 16
Nakano, Motoo Kawasaki, JP 28 521
Nomura, Hiroshi Kawasaki, JP 449 6816

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