Cryopump synchronous motor load monitor
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United States of America Patent
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-
Jul 29, 1997
Issued Date -
N/A
app pub date -
Jan 18, 1994
filing date -
Oct 11, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.
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